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Silke H. Christiansen

dblp:202/8760 · DBLP profile ↗
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1ranked-venue papers
1as first author
0since 2021 · last 2006
0000-0002-4908-4087ORCID · reported

Domains — the database's venue-derived domains; a paper can count in several

Applied, interdisciplinary, general and emerging computing · 1 · 1 first-author

Expertise — from the expertise taxonomy: the topics of the expert's papers under the CCF categories. A weight counts papers with recency: 1 for a paper about the topic, 0.3 when the topic is its context, halved every five years.

Computer architecture, parallel and distributed computing, and storage systems
1 paper
Integrated circuit design · 83% Emerging computing paradigms · 17%

Topics — the 4 heaviest of 5, each with the papers that count most for it

TopicWeightPapersLastEvidence papers
Integrated circuit design
3d integration
0.112006
Wafer Direct Bonding: From Advanced Substrate Engineering to Future Applications in Micro/Nanoelectronics · Proc. IEEE 2006
Integrated circuit design › semiconductor devices
silicon-on-insulator
0.112006
Wafer Direct Bonding: From Advanced Substrate Engineering to Future Applications in Micro/Nanoelectronics · Proc. IEEE 2006
Emerging computing paradigms › nanotechnology
nanoelectromechanical systems
0.012006
Wafer Direct Bonding: From Advanced Substrate Engineering to Future Applications in Micro/Nanoelectronics · Proc. IEEE 2006
Emerging computing paradigms
nanotechnology
0.012006
Wafer Direct Bonding: From Advanced Substrate Engineering to Future Applications in Micro/Nanoelectronics · Proc. IEEE 2006

Methods — techniques the papers use, named apart from their topics

smart-cut process · 0.1layer splitting · 0.1hydrogen/helium implantation · 0.1
YearPublicationVenuePosition
2006 Wafer Direct Bonding: From Advanced Substrate Engineering to Future Applications in Micro/Nanoelectronics
abstract
Wafer direct bonding refers to the process of adhesion of two flat mirror-polished wafers without using any intermediate gluing layers in ambient air or vacuum at room temperature. The adhesion of the two wafers occurs due to attractive long range van der Waals or hydrogen bonding forces. At room temperature the bonding energy of the interface is low and higher temperature annealing of the bonded wafer pairs has to be carried out to enhance the bonding energy. In this paper, we describe the prerequisites for the wafer-bonding process to occur and the methods to prepare the suitable surfaces for wafer bonding. The characterization techniques to assess the quality of the bonded interfaces and to measure the bonding energy are presented. Next, the applications of wafer direct bonding in the fabrication of novel engineered substrates such as "silicon-on-insulator" and other "on-insulator" substrates are detailed. These novel substrates, often called hybrid substrates, are fabricated using wafer bonding and layer splitting via a high dose hydrogen/helium implantation and subsequent annealing. The specifics of this process, also known as the smart-cut process, are introduced. Finally, the role of wafer bonding in future nanotechnology applications such as nanotransistor fabrication, three-dimensional integration for high-performance micro/nanoelectronics, nanotemplates based on twist bonding, and nano-electro-mechanical systems is discussed
Silke H. Christiansen, Rajendra Singh, Ulrich Gosele
Proc. IEEE1