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Kyu Dong Jung

dblp:26/4690 · DBLP profile ↗
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1ranked-venue papers
0as first author
0since 2021 · last 2001
—ORCID · none

Domains — the database's venue-derived domains; a paper can count in several

Artificial intelligence and machine learning · 1Systems, architecture and hardware · 1

Expertise — from the expertise taxonomy: the topics of the expert's papers under the CCF categories. A weight counts papers with recency: 1 for a paper about the topic, 0.3 when the topic is its context, halved every five years.

Computer architecture, parallel and distributed computing, and storage systems
1 paper
Integrated circuit design · 100%

Topics — the 1 heaviest of 1, each with the papers that count most for it

TopicWeightPapersLastEvidence papers
Integrated circuit design › microelectromechanical systems
micromachining
0.012001
A Decoupled Vibratory Gyroscope using a Mixed Micro-machining Technology · ICRA 2001

Methods — techniques the papers use, named apart from their topics

wafer-level vacuum packaging · 0.0mixed micro-machining · 0.0
YearPublicationVenuePosition
2001 A Decoupled Vibratory Gyroscope using a Mixed Micro-machining Technology
abstract
This paper presents the highly reliable and wafer level vacuum packaged vertical micro-gyroscope with decoupled vibrating structures. In order to increase the sensitivity by exact tuning the resonant modes without instability problem, we devised two torsion springs for sensing mode in addition to four driving springs attached to outer gimbal. For the fabrication of the proposed gyroscope with high aspect ratio and wafer level vacuum packaging, we used the mixed micro-machining process which has the merits of a conventional surface and bulk micro-machining process. The measured vacuum level of the fabricated gyroscope was about 100 mTorr and the driving and sensing mode frequencies were tuned in 5 Hz. The gyroscope has the sensitivity of 0.013 deg./sec and bandwidth of 60 Hz. The output non-linearity is below than 2% in +100 deg./sec full scale.
Byeung Leul Lee, Sang Woo Lee, Kyu Dong Jung, Joon Hyock Choi, Taek Ryong Chung, Yong Chul Cho
ICRA3