The AFM is a common tool for ultra-precise surface characterization and a standard instrument a variety of research and development disciplines. However, the characterization of three dimensional high-aspect ratio and sidewall structures remains a hardly accomplishable task. Novel exchangeable and customizable scanning probe tips - NanoBits - can be attached to standard AFM cantilevers offering unprecedented freedom in adapting the shape and size of the tips. These NanoBits of few μm size have to be assembled into micro-cartridges. This challenging assembly task is performed inside the SEM by a micro-gripper. A powerful automation framework has been developed facilitating image based automation and visual servoing for this task. Template matching, BLOB-detection, and special SEM-based detection approaches are used to achieve the automated assembly.

In this paper, the concept and first results of a novel toolbox for nanoscale characterization are presented. A nanorobotic AFM system is being developed and integrated into a high resolution SEM/FIB system allowing nanoanalysis, -manipulation and -structuring. The compact and modular AFM setup enables probe- as well as sample-scanning and uses self-sensing AFM cantilevers. Image fusion algorithms are developed to merge SEM and AFM information for hybrid analysis of nanoscale objects. A commercial AFM controller is embedded into a special control system architecture that allows for automation of nanomanipulation sequences.

Earliest deadline first scheduling performs processor utilization up to 100 percent and improved robustness in overload situations. However, most automotive applications are running under static priority policy. Because of this, the standard operating system in the automotive industry, OSEK/VDX, just supports priority scheduling. This paper describes an EDF scheduler plug-in for OSEK/VDX. The plug-in provides EDF scheduling without changes to the operating system by delaying task activations. The add-on was tested for an engine management system developed by SiemensVDO. Results of this experiment are presented and discussed, showing that the EDF scheduling techniques can improve the system in aspects of robustness and resource utilization.