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Petronilla Scintu

dblp:300/7008 · DBLP profile ↗
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1ranked-venue papers
0as first author
0since 2021 · last 2003
—ORCID · none

Domains — the database's venue-derived domains; a paper can count in several

Applied, interdisciplinary, general and emerging computing · 1

Expertise — from the expertise taxonomy: the topics of the expert's papers under the CCF categories. A weight counts papers with recency: 1 for a paper about the topic, 0.3 when the topic is its context, halved every five years.

Computer architecture, parallel and distributed computing, and storage systems
1 paper
Integrated circuit design · 44% Electronic design automation · 44% Memory systems · 13%

Topics — the 2 heaviest of 3, each with the papers that count most for it

TopicWeightPapersLastEvidence papers
Electronic design automation
semiconductor manufacturing		 0.012003
Survey on flash technology with specific attention to the critical process parameters related to manufacturing · Proc. IEEE 2003
Memory systems
non-volatile memory		 0.012003
Survey on flash technology with specific attention to the critical process parameters related to manufacturing · Proc. IEEE 2003
YearPublicationVenuePosition
2003 Survey on flash technology with specific attention to the critical process parameters related to manufacturing
abstract
In this paper, the history of flash processes will be presented, starting with the 1.2-μm technology to the most current technology. The front- and back-end process modules will be reviewed taking into account the main impact on cell functionality and reliability. In particular, the lithographic and mask issues, the diffusion and cleaning process steps, the chemical mechanical planarization technique to improve planarization, and the high-energy and large-tilted implant will be covered. Finally, the process and equipment trends for the next-generation flash technology will be presented.
Giancarlo Ginami, Danilo Canali, Davide Fattori, Giuliana Girardi, Petronilla Scintu, Laura Tarchini, Domenica Tricarico
 Proc. IEEE5