This paper presents a methodology for the efficient modeling of substrate noise coupling. A closed-form Green's function for nonuniformly doped substrates is employed with the correct singular characteristics. A novel global surface impedance matrix scheme is introduced to efficiently model nonuniformly doped wells, channel stop implants, and buried layers. Layout, device, and netlist extractors are developed so as to integrate our boundary element method (BEM) solver with commercial layout and circuit simulation tools.

We present a comprehensive methodology for the electrodynamic modeling of substrate noise coupling. A new and efficient method is introduced for the calculation of the Green's function that can accommodate arbitrary substrate doping profiles and thus facilitate substrate noise analysis using boundary element methods. In addition to a discussion of the application of the method and its validation in the context of substrate transfer resistance extraction, preliminary results from its application to frequency-dependent substrate noise modeling are presented also.