Force measurement of the micro objects is very important for micromanipulation. For high accuracy, stiffness of the finger tip can be reduced for force measurement. It is not suitable for manipulation. So we consider to evaluate the stress on the micro structure to measure the force. Force measurement based on stress information has advantages when the structure is miniaturized. This can be shown by the scaling analysis. Hence, we propose a new force measurement and micromanipulation method using the laser Raman spectrophotometer (LRS). We design a micro gripper that employs the proposing force measurement method. We show experimental results of force measurement with the analytical evaluation to explain the effectiveness of the proposed system.

Micro manipulation is required for assembling and maintenance works of micro machines and their parts. This paper proposes a handling strategy for micro objects based on micro physics. Attractive forces are modeled and their reduction methods are presented. The authors show experimental results of reducing these forces. Based on the proposed reduction methods, the authors present a new micro manipulation strategy. Grasping of the micro object or press motion is required in some situations, and force information becomes important. The authors propose to use a laser Raman spectrophotometer with single crystal silicon and a strain gauge for the measurement and calibration of the force applied to the micro object. The experimental results of calibrating the force sensing system is presented.