It is important to manipulate a biological small object, such as a cell and embryo. Three-dimensional high speed micromanipulation is needed as a fundamental technology for biology and bio-engineering application. In this paper, we focus on the contact type micromanipulation in the liquid. We designed and made a contact type micromanipulation system which has a 3-DOF narrow range positioning system on a 3-DOF wide range positioning system. We developed a micro tri-axial force sensor which can be installed near the tip of the end effector. Performance of this micro-force sensor is presented.

A parallel beam structure has many significant features, as follows: (i) the tip moves in parallel at the end; (ii) this structure converts a small displacement into a large strain; and (iii) when piling up this structure, each unit doesn't interfere with the other units. We used this structure for a piezoelectric vibrating gyroscope (angular rate sensor), and detected angular rate using this gyroscope. In the paper, we analyze features of the parallel beam structure by the finite element method. We show that the resonance frequency of the drive unit and sensor unit can be easily adjusted by changing the mass at the tip. From this result, this structure suits the gyroscope.

Piezoelectric materials are used for sensors and actuators. It is difficult to form complicated structures with piezoelectric materials, so the actuators and sensors are simple. Using the hydrothermal method, we can fabricate PZT thin film on a three dimensional titanium substrate. We use this feature for actuators and sensors, and made a new sensor/actuator unit using this method on a parallel beam structure. We propose application examples to a two degrees of freedom actuator, G-sensor, and vibration gyroscope.

Minimum invasive surgery using intravascular surgical tools is getting greater attention in the medical field. This technique allows us to reduce physical pain for patients. For example, a catheter is one of the medical tools for endovascular surgeries. The catheter is frequently used for neurosurgical operations. We propose a new type of force sensor for intravascular neurosurgery. This micro force sensor can be installed on the tip of the catheter. We developed a prototype micro force sensor whose diameter is 1.6 mm and length is 12 mm. Using this micro force sensor, we can measure the contact force between the catheter and blood vessels. It is possible to push the blood vessel wall hard when operators use the catheter. So, to express the contact force between catheter and blood vessels is very important for safe operation. In this paper, we show the structure of the micro force sensor and its characteristics.

Micro manipulation is required for assembling and maintenance of micro machines and their parts. As the handling objects are miniaturized, attractive forces such van der Waals force, surface tension force and electrostatic force between micro objects and gripper surface become dominant in the air, and they work as adhesive forces. We cannot neglect such adhesive forces in micro manipulation. Considering the physical phenomena in the micro world, we propose reduction methods of adhesive forces. Surface roughness of the endeffector surface is effective to reduce the van der Waals force. We propose to make micro pyramids on the end-effector surface by micromachining techniques. We designed and made a prototype of the micro gripper with a micro end-effector whose gripping surface is covered with micro pyramids. Experimental results show effectiveness of micro pyramids for reduction of the adhesive force. We also made a semiconductor strain gauge at the end of the micro end-effector surface for force measurement. Both micro pyramids and the integrated piezoresistive force sensor are fabricated on the micro end-effector by the micromachining techniques. Performance of this force sensor is shown.