This paper reports the remote handling of microscale objects, between two sites approximately 630 km distant. To manipulate objects less than 10 ¿m, specific equipments such as AFM (Atomic Force Microscope) cantilevers integrated into a SEM (Scanning Electron Microscope) are generally required. Enabling remote access to such a system would benefit any micro/nanoresearcher. However, vision feedback and sensor data of a micromanipulation system are generally limited, hence the implementation of a teleoperation scenario is not straightforward. Specific tools are proposed here for an intuitive manipulation in a wide range of applications. To ensure ease of manipulation, both a 3D virtual representation of the scene and haptic feedback are provided. Force sensor feedback is limited since only two measures are available. In order to extend this information, vision algorithms are developed to estimate the respective positions of the tool and objects, which are then used to calculate the haptic feedback. The stability of the overall scheme is very sensitive to time delays. This requirement is taken into account in vision algorithms and the communication module which transfers the data between the two remote sites. In addition, the proposed robotic control architecture is modular so that the platform can be used for a wide range of applications. First results are obtained on a teleoperation between Paris, France, and Oldenburg, Germany.

Carbon nanotubes (CNTs) are one of the most promising materials for nanoelectronic applications. Before bringing CNTs into large-scale production, a reliable nanorobotic system for automated handling and characterization as well as prototyping of CNT-based components is essential. This paper presents the NanoLab setup, a nanorobotic system that combines specially developed key components such as electrothermal microgrippers and mobile microrobots inside a scanning electron microscope. The working principle and fabrication of mobile microrobots and electrothermal microgripper as well as their interaction and integration is described. Furthermore, the NanoLab is used to explore novel key strategies such as automated locating of CNTs for pick-and-place handling and methods for electrical characterization of CNTs. The results have been achieved within the framework of a European research project where the scientific knowledge will be transfered into an industrial system that will be commercially available for potential customers.

This paper analyzes the disturbance sources acting on nano-assembly systems inside the scanning electron microscope, which complicate the automation of assembly processes in the scanning electron microscope. The influence of intrinsic sources, i.e. thermal drift, actuator offset and end effector vibrations due to actuator movements are examined and approaches are suggested. The electron-beam interaction with the assembly system has been identified as another disturbance source and its impact on automated assembly processes is qualified and quantified. Solutions for disturbance-resistant assembly processes are suggested.