The inductively coupled plasma (ICP) source is widely used in the semiconductor manufacturing industry. The main challenge is delivering a high frequency and low harmonic current with multi-level power modulation. The multi-level power mode is required for advanced manufacturing processes and it modulates the output power repeatedly, the energy storage components charge and discharge rapidly, leading to very large transient power losses on switches, especially for the lagging bridge which loses ZVS operation. This paper discussed the matching network design for the ICP source and the steady-state analysis for its phase-shift modulation. Furthermore, the transient power loss mechanism during the multi-level power modulation is elaborated by using multiple harmonic approximation. Finally, the design guidance for ICP source working at multi-level power mode is discussed to achieve high efficiency and high reliability. A 2kW prototyping system is built to validate the proposed analysis and design for the ICP source.

Rapidly developing household energy storage systems raise the demand for corresponding DC-DC converters. Although topologies like LLC have already achieved good performance in these large-power and wide-voltage-range applications, they still have shortcomings in dealing with low-voltage battery cells. When converting from low voltage to high voltage, conventional methods can hardly control output current well when the normalized voltage gain is greater than one. Moreover, they cannot ensure a constantly small turn-off current on the low-voltage side over various working conditions, which affects efficiency and stability. To overcome these drawbacks, the paper proposes a hybrid strategy combining frequency and phase modulation for LC resonant converters. First, the theoretical model of the proposed method is constructed and analyzed. Second, a circuit is built and the proposed method is implemented, which is subsequently tested at different working conditions. As the experimental result, the actual output current is close to the expectation and the turn-off current is nearly a small constant at all the working conditions. Hence, the proposed modulation strategy is verified to solve those drawbacks. Furthermore, based on this method, close-loop output current and voltage controller will also be easier to design.

The continuous-control-set model predictive control (CCS-MPC) has been proven as a suitable multi-input multi-output (MIMO) control method for the Multi-Active-Bridge (MAB) converter. It can improve the dynamic response, minimize the cross-coupling effect inherently, and simplify the controller design. However, the constraints on the phase shift angle of the MAB converter are inevitable and have not been addressed in the existing CCS-MPC scheme. To overcome this issue, this paper proposed a CCS-MPC method for MAB converter that considers the phase shift constraints. The optimization problem is formulated based on the predictive model and then converted to a standard quadratic programming (QP) problem with phase shift constraints. The optimization package OSQP is employed for solving the constrained QP problem. The effectiveness of the proposed control method is validated through simulation and experiment.

With the rapid development of Guangzhou's economy and urbanization and the gradual deepening of the urban planning and development system, various types of engineering construction activities have become increasingly frequent, and different degrees of ground subsidence have appeared in some areas of the city.Traditional InSAR technology is greatly affected by terrain residuals when monitoring surface deformation.To improve the accuracy and resolution of the digital elevation model and remove the terrain residual phase is the key to improve the monitoring accuracy of temporally interferometric SAR deformation.Based on the TerraSAR-X and tandem X acquisition of high-precision DEM, this paper proposes a Tandem-assisted sequential interference SAR (permanent scatterer) technology, 21 views of ENVISAT/ASAR data and 56 views sentinels on Pazhou Island in Guangzhou City - 1 The data was processed to obtain high-precision monitoring results of surface subsidence and spatio-temporal evolution of urban areas in the study area.The experimental results show that the DEM extracted by TSX/TDX can significantly improve the accuracy of temporally interferometric synthetic aperture radar, and proves that this method has a good effect and application potential in the monitoring of urban surface subsidence.