Demonstration venue · read-only. Every page can be browsed; the buttons that would change it are switched off. Create an account to run TaxoReview on your own data. A simulation from public publication records: the people listed were not invited and did not agree to review.
? Tutorial for this page

Mark Kilgard

dblp:316/9986 · DBLP profile ↗
← Back
1ranked-venue papers
0as first author
1since 2021 · last 2022
—ORCID · none

Domains — the database's venue-derived domains; a paper can count in several

Systems, architecture and hardware · 1 · 1 since 2021

Expertise — from the expertise taxonomy: the topics of the expert's papers under the CCF categories. A weight counts papers with recency: 1 for a paper about the topic, 0.3 when the topic is its context, halved every five years.

Computer architecture, parallel and distributed computing, and storage systems
1 paper
Electronic design automation · 100%

Topics — the 3 heaviest of 3, each with the papers that count most for it

TopicWeightPapersLastEvidence papers
Electronic design automation › semiconductor manufacturing
lithography modeling
0.612022
Generic lithography modeling with dual-band optics-inspired neural networks · DAC 2022
Electronic design automation › technology computer-aided design › process simulation
lithography simulation
0.612022
Generic lithography modeling with dual-band optics-inspired neural networks · DAC 2022
Electronic design automation
physical design
0.612022
Generic lithography modeling with dual-band optics-inspired neural networks · DAC 2022

Methods — techniques the papers use, named apart from their topics

optics-inspired architecture · 0.6neural network · 0.6
YearPublicationVenuePosition
2022 Generic lithography modeling with dual-band optics-inspired neural networks
abstract
Lithography simulation is a critical step in VLSI design and optimization for manufacturability. Existing solutions for highly accurate lithography simulation with rigorous models are computationally expensive and slow, even when equipped with various approximation techniques. Recently, machine learning has provided alternative solutions for lithography simulation tasks such as coarse-grained edge placement error regression and complete contour prediction. However, the impact of these learning-based methods has been limited due to restrictive usage scenarios or low simulation accuracy. To tackle these concerns, we introduce an dual-band optics-inspired neural network design that considers the optical physics underlying lithography. To the best of our knowledge, our approach yields the first published via/metal layer contour simulation at 1nm2/pixel resolution with any tile size. Compared to previous machine learning based solutions, we demonstrate that our framework can be trained much faster and offers a significant improvement on efficiency and image quality with 20× smaller model size. We also achieve 85× simulation speedup over traditional lithography simulator with ~ 1% accuracy loss.
Zongyi Li, Kumara Sastry, Saumyadip Mukhopadhyay, Mark Kilgard, Anima Anandkumar, Brucek Khailany, Haoxing Ren
DAC5