In order to analyze short-channel effects of MOS transistor ac characteristics, a two-dimensional device simulator has been used to extract MOS transistor capacitances. The results of simulation and measurements agree well. The causes of short-channel effects have been understood and explained by the simulations. Two-dimensional effects and velocity saturation are the main causes of short-channel effects in MOS transistor capacitances. Two-dimensional simulation was found to be a useful tool for studying mobility models, as well as for obtaining capacitance models for circuit simulation.

This paper examines iterative methods for solving the semiconductor device equations. The emphasis is on fully coupled methods, because of the failure of decoupled methods for on-state devices. Using the PISCES-II device simulator as a vehicle, incomplete factorization and operator decomposition iterative methods are presented for solving the Newton equations. The dependencies of these methods on factors such as choice of variables, bias condition and initial guess are analyzed. The results are compared with sparse Gaussian elimination.