In this paper, a nanorobotic system containing a custom-made nanohandling robot, atomic force microscope, scanning electron microscope and focused ion beam is presented. The nanorobotic atomic force microscope system facilitates the analysis of nanostructured surfaces as well as the handling of nanoobjects. Furthermore, a gas injection system is available that enables particle beam-based structuring and deposition of nanomaterials. This combination provides an enabling technology for the hybrid processing, manipulation and characterization of nanomaterials.

Modern processes of micro- and nanofabrication imply several metrology steps on critical dimensions in order to assure and assess device perfomences. Particularly, manufacturing processes of novel disruptive photonic devices and nanoelectronic circuit architectures require improved three dimensional acquisition and visualization techniques for their metrology. Amongst others line width and sidewall roughness are the most important parameters for nanooptical components but the determination of these parameters becomes increasingly demanding, since the continuous shrinkage of these devices demand an even higher lateral resolution of the measurements. The atomic force microscope (AFM) is a common tool for this characterization and a standard instrument for all kinds of research and development disciplines. However, the characterization of three dimensional high-aspect ratio and sidewall structures remains a hardly accomplishable task. Novel exchangeable and customizable scanning probe tips, so-called NanoBits, can be attached to standard AFM cantilevers offering unprecedented freedom in adapting the shape and size of the tips to the surface topology of the specific application. The ultimate goal is the realization of an in-situ exchange of NanoBits within the regular AFM environment. For this, NanoBits have to be provided in a freestanding way, making them accessible for the AFM cantilever. The direct fabrication of such structures is still challenging, hence the robotic preassembly of NanoBits cartridges is proposed, where every cartridge can carry several different NanoBits. Within this paper all components required for the realization of this concept are presented.

This paper presents a nanorobotic approach facilitating the transfer and characterization of individual graphene flakes that are grown by different fabrication techniques. The approach makes use of a nanorobotic atomic force microscope system that is integrated into a high resolution scanning electron microscope and focused ion beam device. This combination is used to perform both, the nanorobotic transfer and the mechanical characterization of the graphene flake allowing to systematically analyze different sample areas and to optimize the fabrication processes. Furthermore, the nanorobotic system enables the reliable pick-and-place handling and processing of graphene flakes to realize more comprehensive analysis steps or even the prototyping of graphene-based devices.

In this paper, a focused ion beam processing technique is presented that facilitates the modification of carbon nanotubes (CNTs) in terms of length, diameter, and orientation. The CNTs are mounted onto an atomic force microscope (AFM) probe by using a nanorobotic microgripper-based pick-and-place handling strategy. Such CNT-enhanced AFM probes are needed for metrology measurements of nanostructures with critical dimensions and high aspect ratios. The complete process of assembly and processing is realized inside a nanorobotic dual beam scanning electron microscope (SEM) and focused ion beam (FIB) machine.

In this paper, a novel nanorobotic strategy for non-destructive and direct electrical characterization of as-grown bundles of single-walled carbon nanotubes (SWCNTs) is presented. For this purpose, test patterns of SWCNT bundles having different diameters are grown on a silicon substrate by chemical vapor deposition. A new design of microstructured four-point-probes is proposed and fabricated allowing for direct contacting of vertically aligned bundles of SWCNTs. A nanorobotic setup is upgraded into a dual endeffector system to achieve good electrical contact between four-point-probe and SWCNT bundle and to perform electrical measurements. First experimental results of non-destructive electrical characterization are presented and discussed.

In this paper, the concept and first results of a novel toolbox for nanoscale characterization are presented. A nanorobotic AFM system is being developed and integrated into a high resolution SEM/FIB system allowing nanoanalysis, -manipulation and -structuring. The compact and modular AFM setup enables probe- as well as sample-scanning and uses self-sensing AFM cantilevers. Image fusion algorithms are developed to merge SEM and AFM information for hybrid analysis of nanoscale objects. A commercial AFM controller is embedded into a special control system architecture that allows for automation of nanomanipulation sequences.

Carbon nanotubes (CNTs) are one of the most promising materials for nanoelectronic applications. Before bringing CNTs into large-scale production, a reliable nanorobotic system for automated handling and characterization as well as prototyping of CNT-based components is essential. This paper presents the NanoLab setup, a nanorobotic system that combines specially developed key components such as electrothermal microgrippers and mobile microrobots inside a scanning electron microscope. The working principle and fabrication of mobile microrobots and electrothermal microgripper as well as their interaction and integration is described. Furthermore, the NanoLab is used to explore novel key strategies such as automated locating of CNTs for pick-and-place handling and methods for electrical characterization of CNTs. The results have been achieved within the framework of a European research project where the scientific knowledge will be transfered into an industrial system that will be commercially available for potential customers.

A nanorobotic manipulation setup for the handling and characterization of carbon nanotubes (CNTs) is presented. The nanorobotic setup can be integrated into a scanning electron microscope (SEM) and various endeffectors may be attached to the manipulator either for CNT handling or characterization. The pick-and-place task is carried out by using an electrothermal actuated microgripper, designed for controlled manipulation of nanotubes. The nanotube is picked up from an array of multiwalled carbon nanotubes (MWCNTs) and transferred to the tip of an atomic force microscope (AFM) probe in order to assemble a high-aspect ratio AFM supertip. Another application of the nanorobotic setup considered in this paper is the nondestructive mechanical characterization of CNTs. A piezoresistive AFM probe is used to bend MWCNTs, while the bending force is measured, in order to estimate the Young's modulus of the investigated MWCNTs.