Recent CAD methodologies of Design-for-Manufacturability (DFM) have naturally led to a significant increase in the number of process and layout parameters that have to be taken into account in design-rule checking. Methodological consistency requires that a similar number of parameters be taken into account during layout parasitic extraction. Because of the inherent variability of these parameters, the issue of efficiently extracting deterministic parasitic sensitivities with respect to such a large number of parameters must be addressed. In this paper, we tackle this very issue in the context of capacitance sensitivity extraction. In particular, we show how the adjoint sensitivity method can be efficiently integrated within a finite-difference (FD) scheme to compute the sensitivity of the capacitance with respect to a large set of BEOL parameters. If np is the number of parameters, the speedup of the adjoint method is shown to be a factor of np/2 with respect to direct FD sensitivity techniques. The proposed method has been implemented and verified on a 65nm BEOL cross section having 10 metal layers and a total number of 59 parameters. Because of its speed, the method can be advantageously used to prune out of the CAD flow those BEOL parameters that yield a capacitance sensitivity less than a given threshold.

We present a noise-driven effective capacitance method for estimating the combined propagation noise and crosstalk noise. Gate propagation noise rules are efficiently calculated inside the Ceff procedure to determine a linear Thevenin model of the victim driver. A voltage-dependent current source model [2, 6] of the driver, along with a load capacitor is analyzed to generate the gate output waveform, from which noise rules are directly extracted. This method removes potential errors introduced in traditional look-up table or fitted-equation based noise rules. The linear driver Thevenin model can then be employed to analyze the propagation noise, while the same Thevenin resistance can be used to analyze the crosstalk noise. The combined coupling and propagation noise can then be estimated using superposition. In this work, we extend the popular timing-driven effective capacitance method into the noise domain. Similar to the effective capacitance method in timing analysis, this technique can successfully separate the nonlinear driver analysis from the linear interconnect analysis. In addition, the linear driver model can significantly ease the task of finding the worst-case peak alignment among all the victim and aggressor noise sources. Experimental results on both RC and RLC nets from industry designs show both accuracy and efficiency compared to SPICE results.

One means of reducing pessimism in crosstalk analysis is to consider timing orthogonality. While earlier works have addressed the temporal alignment of timing windows [1, 2, 3, 4], these treatments have overlooked one key point. Crosstalk noise failures are frequency dependent. A chip that functions at one frequency can fail due to crosstalk noise at faster and slower frequencies. Moreover, because system developers and manufacturers need chips that operate over a wide range of frequencies, noise analysis tools should guarantee a wide range of operation. In this paper, we explain this phenomenon and propose a simple procedure to include timing information and guarantee functionality from dc to fmax.

Although three-dimensional (3-D) partial inductance modeling costs have decreased with stable, sparse approximations of the inductance matrix and its inverse, 3-D models are still intractable when applied to full chip timing or crosstalk analysis. The 3-D partial inductance matrix (or its inverse) is too large to be extracted or simulated when power-grid cross-sections are made wide to capture proximity effect and wires are discretized finely to capture skin effect. Fortunately, 3-D inductance models are unnecessary in VLSI interconnect analysis. Because return currents follow interconnect wires, long interconnect wires can be accurately modeled as two-dimensional (2-D) transmission lines and frequency-dependent loop impedances extracted using 2-D methods . Furthermore, this frequency dependence can be approximated with compact circuit models for both uncoupled and coupled lines. Three-dimensional inductance models are only necessary to handle worst case effects such as simultaneous switching in the end regions. This paper begins by explaining and defending the 2-D modeling approach. It then extends the extraction algorithm to efficiently include distant return paths. Finally, a novel synthesis technique is described that approximates the frequency-dependent series impedance of VLSI interconnects with compact circuit models suitable for timing and noise analysis.