In this article, a Cartesian coordinate nano-scale positioning platform driven by stack-type piezoelectric actuator associated with flexure hinge mechanism is developed. Structural design and analysis, system identification, and feedforward controller design to deal with the hysteresis effect, as well as and the feedback PID controller designed by use of Ziegler-Nichols method and the genetic algorithm are included. The developed Cartesian platform is able to achieve the target within 10 nm in positioning at the stroke of 19 mum

In this article, hysteresis controller design and static error compensation method for a 6-dof micro-positioning platform driven by piezoelectric actuator is studied. The nonlinear hysteresis effect of the piezoelectric actuator is analyzed by means of Preisach model. Its inverse model is used as the feedforward controller. Error compensation method is designed to compensate the manufacture error and assembly error by use of the developed 3-points-3-axes measurement method. From practical experiment, the proposed method makes improvement on the accuracy of positioning.