Alignment between the injection pipette and the holding pipette/biological entity is crucial for successful cell microinjection. Precision alignment can reduce cell damage and improve cell microinjection. However, in the traditional microscopic vision-based method, lack of depth perception is a drawback in monocular vision. On the other hand, stereo vision with a limited baseline distance and field of view (FOV) makes it challenging to observe biological samples. In this article, a novel hybrid triple-view micro-vision system, in which a binocular telecentric micro-vision unit and an inverted microscope are combined for scene depth and detail sense, is presented for cell microinjection. Based on this system, coarse-to-fine feature extraction methods for two discrepant pipettes are proposed, and a two-stage needle alignment strategy is established based on hybrid pose/image servo control. Some feature extraction and alignment experiments are implemented, and the results demonstrate that the proposed method achieves satisfactory alignment performance (mean position deviation: about 0.1$\mu$m; mean orientation deviation: about 0.4$^\circ$) for zebra embryo microinjection, and the defined symmetry measure can reach 0.09.

Lightly-damped dynamics of a flexure-based mechanism will tend to largely deteriorate the broadband control performance if its hysteresis nonlinearity has been compensated. This paper developed a novel damped piezo-driven decoupled XYZ nanopositioning stage, which consists of three orthogonal parallel kinematic subchains, in which each subchain has a translational pair using a bridge-type piezo-driven actuator and two Cardan joints using two orthogonal- axis flexure hinges. Especially, we add damped inserts into each Cardan joint, as their shearing damping effects can enhance joint damping. Kinematic coupling is theoretically modeled and the decoupled dynamic model of the stage is built up. The frequency response functions with no-damping and damping scenarios are obtained by finite element transient analysis and experimental modal analysis respectively. The results indicate that the damping inserts embedded in the flexure hinges can enhance the stiffness and damping simultaneously, which will benefit broadband motion control of the nanopositioning stage.