This paper describes the algorithm development and experimental results of a vision-guided multiprobe microassembly system. The key focus is to develop the capabilities required for the construction of 3-D structures using only planar microfabricated parts. Instead of using grippers, multiple sharp-tipped probes are coordinated to manipulate parts by using vision feedback. This novel probe-based approach offers both stable part grasping and dexterous part manipulation. The light weight of the part and relatively slow motion means that only kinematics-based control is required. However, probe motions need to be carefully coordinated to ensure reliable and repeatable part grasping and manipulation. Machine vision with multiple cameras is used to guide the motion. No contact force sensor is used; instead, vision sensing of the probe bending is used for the grasp force control. By combining preplanned manipulation sequences and vision-based manipulation, repeatable spatial (in contrast with planar) manipulation and insertion of a submillimeter part have been demonstrated with an experimental testbed consisting of two actuated probes, a passive probe, an actuated die stage, and two cameras for vision feedback.

In our recent work, we have demonstrated effectiveness of the concept of multi-probe microassembly for manipulating and inserting microscale, sub-millimeter, parts to create three-dimensional microstructures. However, the approach has been based on trial-and-error manual teaching of grasp points to ensure a stable grasp during motion. As a result, the part orientation is restricted (nearly aligned with the world reference frame and lying flat) to ensure successful grasping and manipulation. In this paper, we developed a kinematics based hybrid motion and force control based only on vision feedback. We first conduct a systematic analysis of the bending of the probes while they are in contact with the part, to estimate the grasp force based on the vision feedback of the probe configuration. A Jacobian based controller is then used for position manipulation while maintaining the desired squeeze force. Experimental results with two probes and two camera are included to demonstrate the effectiveness of the controller to move the part to specified position and orientation while maintaining sufficient squeeze force to prevent part slippage.

This paper describes the operator assisted automated assembly of a 3-legged spatial platform by using a vision guided multi-probe assembly process. This is the first step towards the ultimate goal of building a microscale active spatial platform. Two issues are highlighted in this paper: contact management and vision feedback. Using multiple probes for part grasping and manipulation has the advantage of robustness and versatility as compared to micro-grippers. However, the contacts between the probes and the part need to be carefully managed to ensure a grasp that is stable for part pick-up and yet manipulable to allow part motion in a controlled fashion. By using vision guidance, the probes can be coordinated to grasp the parts and lift them off the die securely and reliably. We show that the contacts act as point contacts with friction, so when a part is pressed against a stationary probe, the part rotates about the axis between the contacts, changing its orientation so it may be inserted into a slot in the substrate. We have demonstrated that the three legs can be assembled in a fully automated fashion via multiple-camera vision feedback. The platform is at present assembled via tele-operation. The assembled microstructure measures 450 µm×600 µm. We are now working on the full automation of the assembly onto a substrate populated with MEMS actuators.

Flexure joints are frequently used in precision-motion stages and microrobotic mechanisms due to their monolithic construction. The joint compliance, however, can affect the static and dynamic performance of the overall mechanism. In this paper, we consider the analysis and design of general platform-type parallel mechanisms containing flexure joints. Based on static performance measures such as task-space stiffness and manipulability, and constraints such as joint stress, mechanism size, and workspace volume, we pose the design problem as a multiobjective optimization. We first calculate the Pareto frontier, which can then be used to select the desired design parameters based on secondary criteria, such as performance sensitivity and dynamic characteristics. To facilitate design iteration, we apply the pseudo rigid-body approach with a lumped approximation of the flexure joints. A planar mechanism is used to illustrate the analysis and design techniques.

Flexure joints are frequently used in precision motion stages and micro-robotic mechanisms due to their monolithic construction. The joint compliance, however, can affect the static and dynamic performance of the overall mechanism. In this paper, we consider the analysis and design of general platform type parallel mechanisms containing flexure joints. We consider static performance measures such as task space stiffness and manipulability, while subject to constraints such as joint stress, mechanism size, workspace volume, and dynamic characteristics. Based on these performance measures and constraints, we adopt the multi-objective optimization approach. We first obtain the Pareto frontier, which can then be used to select the desired design parameters based on secondary criteria such as performance sensitivity. To simplify presentation, we consider only lumped approximation of flexure joints in the pseudo-rigid-body approach. A planar mechanism is included to illustrate the analysis and design techniques. Tools presented in this paper can also be applied to a broader class of compliant mechanisms, including robots with inherent joint flexibility as well as compliant robots for contact tasks.