As the effective deployment of system production capacity and operational capability becomes critical for competitive semiconductor manufacturing, there is an increasing interest toward the development of a control framework which allows effective and efficient operation of the emerging 300 mm wafer fabs. In the paper, a colored Petri net-based approach is taken to develop such a distributed event-driven 300 mm fab controller. The key element of the proposed controller design is the distribution of control function, to the constituent components of the 300 mm fab, while maintaining the logical correctness and efficiency of the fab behavior. Furthermore, in order to achieve the viability of the resulting control scheme, the proposed approach seeks to incorporate detailed operational characteristics of the 300 mm fabs, including batching, setups, reworks, maintenance, machine failures, and complex resource allocation dynamics due to the routing flexibility and auxiliary resource sharing. The proposed approach is demonstrated through a small-scale example, modeling the operation of a 300 mm fab bay.

Semiconductor fabs are capital intensive. The rate of capital return heavily depends on their productivity. Accordingly, simulation has been adopted in many cases as a viable design and analysis tool to achieve better productivity. However, the gap between the simplistic simulation models and real complex systems has limited the confidence to apply simulation results directly to real systems. Ideally, the simulator should support the rapid modeling and fast execution of high-fidelity fab models in order to be able to provide more realistic simulation results. In this paper, we present our current research effort to develop a high-fidelity web-based simulator for the 300 mm wafer fabs. We take a model-view-control approach that allows us to develop modular and reusable fab simulation objects. The proposed approach is implemented as a distributed system that uses a message-based event synchronization mechanism to coordinate the simulation objects as well as to support distributed simulation execution. The presented simulator also provides a high quality VRML animation for visualization of real time paced simulation execution.